The George J. Kostas Facility for Micro and Nanofabrication
The George J. Kostas Nanotechnology and Manufacturing Facility in the Egan Research Center is the primary facility for micro and nanofabrication at Northeastern University . Established through Mr. George J. Kostas '43 generous gift, The facility was completed in January 2005.
The Kostas facility also serves as the main facility for the new NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) at Northeastern University, in partnership with the University of Massachusetts Lowell , and the University of New Hampshire . The facility is open to faculty, students, researchers, coop students, and external users. The facility provides support and materials based on user fees and has capabilities for processing 3,4, and 6 inch wafers as well as smaller parts. The center consists of three areas.
The first area consists of 5000 square feet of class 10, 1000, and 10000 cleanroom space and includes capabilities for optical lithography, nanolithography, thin film deposition, furnace processes, wet chemical processes, megasonic and ultrasonic cleaning, ICP plasma etching, ion milling, and characterization, including surface topography, thin film characterization, optical microscopy, wire bonding, and particle characterization. The second area includes non-cleanroom lab space with hoods, device testing areas with a full range of electrical test instruments, design areas, and an imaging lab with capabilities in FESEM, e-beam writing, EDX, SPM, nanomanipulators, surface profilometry, and surface energy analsys.
The third area is dedicated to undergraduate and graduate student teams working on projects with corporate partners.
Kostas Facility Super Users have unrestricted 24/7 access to the Kostas Facility clean rooms and all equipment they are trained to use. Hourly internal users also have 24/7 access to the Facility. The $3000.00 quarterly Super User fee includes a quarterly cap of 115 hrs. After 115 hours is reached the user is not charged for the use of the center or equipment for the remainder of the quarterly period. The Kostas Facility fees are applied equally to all internal users: professors, post docs and graduate students. Fees for the center for outside academic or industrial users are available from the facility director.
ICP Plasma Therm 7900
Bruce Furnace 7355B
Prekin Elmer 2400
Material Research Corporation 866
Research Devices M-8
Nikkon Optiphot 200D
Quesant Q Scope
Pioneer 300 Contact Angle Measurment
Dektak profilometer 3ST
KLA Tencor 5500
PZT Megansonic 1
PZT Megansonic 2
Contact Angle Measurement
G&P Chemical Mechanical Polishing Tool
Contact Information For Kostas Fab.
Richard DeVito - Fab Director
467 Egan Bldg.
Phone: (617) 373-4690
Scott McNamara - Fab Manager
448 Egan Bldg .
Phone: (617) 373-7728